Applications in Qualitative
and Quantitative Low Molecular Weight Gas
Mass Spectrometry of Hermetic Packages
Internal Vapor Analysis (IVATM ) Services
Research Services, Inc. (ORS) specializes in Internal
Vapor Analysis (IVA) services to quantitatively measure the primary and trace
gases inside hermetic components. The gas content inside sealed components,
particularly moisture concentration, can cause long term reliability problems
such as corrosion, fogging, leakage, current bit errors and lubrication issues.
Known to some as Residual Gas Analysis (RGA) or "Mil-Std 1018", the test measures
the primary sealing gases and trace gases. It is ideally suited for process development, sealing
quality control, studying long term out-gassing of the enclosed materials inside the components,
and for product qualification.
Applications apply to a wide range of industries including Microelectronics, Large Hermetic Modules, Metals, Ceramics,
Telecommunications, Food, Medical Devices, Pharmaceutical, Packaging and Illumination.
IVA has been a core technology of ORS for almost 30 years. We have Suitability status from the
DLA Land and Maritime (DLA) for qualifying military devices according to Mil-Std-883
TM-1018 and Mil-Std-750 TM 1018. For commercial applications, we conduct the test per our Commercial
Practice Test Method SOP-1053. Our DLA Suitability status is intended for the qualification of
military devices and we are prohibited from changing any test parameters described within the method.
However, there are many instances where the test parameters used for military applications is
inappropriate for commercial product or process development studies
(e.g. sample test temperature and sample pre-bake requirements).
Our Commercial Practice Test Method MEL-1053 exceeds the instrument and calibration requirements of
the Military Standards. The ORS commercial practice test method represents best practices for
R&D and process monitoring applications.
Analysis of samples larger than 0.01 cc internal cavity size is performed on our
IVA 110-s quadrupole mass spectrometer system.
ORS has recently introduced our HR-IVA high resolution Time-of-Flight
mass spectrometer system for measuring samples with an internal free volume cavity as small as 1nl (1X10-6cc).
Both systems were designed and manufactured by ORS. Please view our IVA Instrument Sales
web page for more information on acquiring this technology for use in your facility.
parallel with Internal Vapor Analysis, ORS offers additional
analytical techniques for the Qualification and process development of polymers,
epoxies, coatings, and adhesives
used in passive or active components. Outgassing of
solvents, extenders, or reaction by-products and their
deposition on critical surfaces can be a reliability
concern. Residual outgassing products can be monitored
and quantified by the following methods: Internal Vapor
Analysis, Static headspace analysis by GC/MS, and ampoule analysis.
MEL-1053: Internal Vapor Analysis - Commercial Practice
This test procedure is used for testing hermetic devices in accordance with ORS’ Commercial
Practice for Internal Vapor Analysis (add link). This test method
extends the scope and capabilities of traditional Mil-Std-883 or 750,
method 1018 analysis. It permits variations to the procedure and/or device test
conditions to achieve the best test conditions for specific client applications. Client
specific protocols may be established for maximum accuracy and
sensitivity for product monitoring applications, process development, R&D, materials evaluations and
failure analysis projects. The data is not subject to inclusion in the annual retention report to
DLA and all records regarding these tests are confidential.
MEL-1018: Internal Water Vapor Content - DLA Suitability for Military Devices
This test procedure is used exclusively for testing hermetic devices in accordance with Mil-Std-883 or 750, method 1018, procedure 1 per the conditions of “Suitability” status granted by DLA Land and Maritime (DLA). No variations are permitted to this procedure or to the device test conditions. Furthermore, all tests performed per this procedure are subject to inclusion in the annual retention report to DLA and all records regarding these tests are subject to audit and inspection by the U.S. Government.
New York Office: Suitability Letter (.pdf)
Colorado Office: Suitability Letter (.pdf)
French Office: Suitability Letter (.pdf)
MEL-1070: Gas Cylinder Analysis of Sealing Chamber Atmospheres
This test method quantitatively measures the process sealing gases sampled from sealing chambers and/or gas supply lines using a specially prepared sampling cylinder. Sampling procedures are described in the instructions provided with the sampling cylinders. Contact ORS for availability and rental of sampling cylinders.
MEL-1080: Identification of UNKNOWN volatile and semi-volatile
organic compounds by IVA/GC/MS
This test method is used to identify unknown organic compounds that may be detected by IVA test methods but may not be conclusively identified due to the complexity or trace quantity of the mass spectra. Standard hermetic devices, gas cylinders or individual materials sealed in glass ampules may be analyzed. The technique is useful to understand the trace contaminants, chemical processes of material outgassing and chemical reactions from environmental stress for:
° Microelectronic Components and Multi-Chip Modules
° Fiber-Optic Devices and Sensors
° Light Bulbs, Lamps and Ampoules
° Pacemakers and other Medical devices
° Large-Scale Electronic Devices and Units
° Gas Collection Bottles and Cylinders
(see gas cylinder rental)
° Vials Containing Bulk Material in a Dry Nitrogen Atmosphere
° Voids and Blisters in Processed Metals,
Ceramics and Plastics
° Syringes Containing Extracted Gases
° Mylar Bags and Other Hermetic Packaging
° MEMS Devices
° Epoxies, polymers, coatings, and adhesives
The Test Conditions
° Time/Temperature Preconditioning
° Variable Test Temperature
° Adjustable AMU Scan Range and Speed
° Variable Data Acquisition Time
° Flexibility in Sample Puncture Location
Format of IVA Results
° Qualitative Results
° Quantitative Results
° Spectra Report (AMU vs. Intensity)
° ID of Unknowns through the NIST Mass Spectrometry Database
° Pumpout Curves for all Gases Identified
Format of GC/MS IVA Results
° Semi-Quantitative Results
° Discussion and Summary of analysis
° Tentatively Identified Compounds (TIC) Summary page using NIST’11 Mass Spectral
Database (>243,000 spectra)
° Estimated Concentrations and Chemical Abstract Services (CAS) #’s
° Chromatograms and overlays of Chromatograms and Control samples highlighting
areas of interest
° Individual peak mass spectra available
° Customized report formats available. Call to discuss options.
IVA Test Capabilities
A versatile set of test capabilities allows us to accommodate
a wide variety of samples. This versatility alone makes
Gas Analysis a unique problem-solving tool in any environment.
ORS test capabilities include :
° The ability to test samples with an internal volume of 1nl (1X10-6cc) and up (including
IVA and HR-IVA)
° An accuracy of less than ±5%
° A sensitivity of 10 ppmv or better
° An applied Atomic Mass Unit (AMU) range of 1 to 512
° Access to a Mass Spectrometer Data Base with over 100,000 - 140,000
spectra for assistance in the identification of unknown compounds
° Flexibility in sample holding temperature during
° Flexibility in test protocol
GC/MS Test Capabilities
° PPB range sensitivity
° Typical amu range 35-550. Instrument capability of 1.6 to 1050 amu
° Customized instrument temperature programs
° Scan, SIM (Select Ion Monitoring), and synchronous SIM/Scan capability
° Negative EI (electron impact)
° Flexibility in sample holding temperature during analysis
° Flexibility in sample pre-bake times
° Flexibility in test protocol
Analysis Services Customized to Fit Your Needs
Our experienced technical and sales staff will be happy
to discuss your specific application in detail with
you and recommend a test plan that will fit your individual
needs. To submit samples for gas analysis, simply print
out our IVA Sample Submission Form, enter in the
appropriate information and mail the samples and submission
form to ORS.
Call to discuss your applications with our technical staff - 1 (855) ORS LABS